F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride (SF₆), nitrogen trifluoride(NF₃) are known to have green house effects. Although the net emission rates of gases containing fluorine are muchlower than those of CO₂, their contribution to global warming cannot be ignored because of their extremely high globalwarming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processesand in the electric power distribution industry of the national key industry. One of practical solutions of controlling theemission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtureswith nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-basedprocess.